Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas
- In this work, we analyze the creation of the discharge asymmetry and the concomitant formation of the DC self-bias voltage in capacitively coupled radio frequency plasmas driven by multi-frequency waveforms as a function of the electrode surface characteristics. For the latter, we consider and vary the coefficients that characterize the elastic reflection of electrons from the surfaces and the ion-induced secondary electron yield. Our investigations are based on particle-in-cell/Monte Carlo collision simulations of the plasma and on a model that aids the understanding of the computational results. Electron reflection from the electrodes is found to slightly affect the discharge asymmetry in the presence of multi-frequency excitation, whereas secondary electrons cause distinct changes to the asymmetry of the plasma as a function of the phase angle between the harmonics of the driving voltage waveform and as a function the number of these harmonics.
| Author: | Ranna U. MasheyevaORCiDGND, Karlygash N. DzhumagulovaORCiDGND, Murat MyrzalyORCiDGND, Julian SchulzeORCiDGND, Zóltán DonkóORCiDGND |
|---|---|
| URN: | urn:nbn:de:hbz:294-87970 |
| DOI: | https://doi.org/10.1063/5.0055444 |
| Parent Title (English): | AIP advances |
| Publisher: | AIP Publishing LLC. |
| Place of publication: | College Park |
| Document Type: | Article |
| Language: | English |
| Date of Publication (online): | 2022/03/30 |
| Date of first Publication: | 2021/07/22 |
| Publishing Institution: | Ruhr-Universität Bochum, Universitätsbibliothek |
| Tag: | Open Access Fonds |
| Volume: | 11 |
| Issue: | 7, Artikel 075024 |
| First Page: | 075024-1 |
| Last Page: | 075024-14 |
| Note: | Article Processing Charge funded by the Open Access Publication Fund of Ruhr-Universität Bochum. |
| Institutes/Facilities: | Institut für Experimentalphysik V, Lehrstuhl für Plasma- und Atomphysik |
| Dewey Decimal Classification: | Technik, Medizin, angewandte Wissenschaften / Elektrotechnik, Elektronik |
| open_access (DINI-Set): | open_access |
| faculties: | Fakultät für Elektrotechnik und Informationstechnik |
| Licence (English): |  Creative Commons - CC BY 4.0 - Attribution 4.0 International |
