Contrast enhancement for topographic imaging in confocal laser scanning microscopy
- The influence of the axial pinhole position in a confocal microscope in terms of the contrast of the image is analyzed. The pinhole displacement method is introduced which allows to increase the contrast for topographic imaging. To demonstrate this approach, the simulated data of a confocal setup as well as experimental data is shown. The simulated data is verified experimentally by a custom stage scanning reflective microscopy setup using a semiconductor test target with low contrast structures of sizes between 200 nm and 500 nm. With the introduced technique, we are able to achieve a contrast enhancement of up to 80% without loosing diffraction limited resolution. We do not add additional components to the setup, thus our concept is applicable for all types of confocal microscopes. Furthermore, we show the application of the contrast enhancement in imaging integrated circuits.
| Author: | Lena SchnitzlerGND, Markus FinkeldeyGND, Martin HofmannGND, Nils Christopher GerhardtGND |
|---|---|
| URN: | urn:nbn:de:hbz:294-67656 |
| DOI: | https://doi.org/10.3390/app9153086 |
| Parent Title (English): | Applied sciences |
| Publisher: | MDPI |
| Place of publication: | Basel |
| Document Type: | Article |
| Language: | English |
| Date of Publication (online): | 2019/11/27 |
| Date of first Publication: | 2019/07/31 |
| Publishing Institution: | Ruhr-Universität Bochum, Universitätsbibliothek |
| Tag: | Open Access Fonds confocal microscopy; contrast enhacement; microscopy |
| Volume: | 9 |
| Issue: | 15 |
| First Page: | 3086-1 |
| Last Page: | 3086-12 |
| Note: | Article Processing Charge funded by the Deutsche Forschungsgemeinschaft (DFG) and the Open Access Publication Fund of Ruhr-Universität Bochum. |
| Institutes/Facilities: | Lehrstuhl für Photonik und Terahertztechnologie |
| open_access (DINI-Set): | open_access |
| faculties: | Fakultät für Elektrotechnik und Informationstechnik |
| Licence (English): |  Creative Commons - CC BY 4.0 - Attribution 4.0 International |
