Exchangeable miniaturized mass spectrometer chip based on silicon structures
- This paper reports a design of an exchangeable miniaturized mass spectrometry chip using spring-loaded pins and O-rings for electrical and fluidic connections. This planar microelectromechanical system (MEMS)-chip works with 300 \(\mu\)m high silicon structures between two borosilicate glasses and has a size of 13 mm × 7 mm. Because of its small size a small vacuum pump is sufficient, and it is suitable for mobile measurements and portable applications. Because of exchangeability of MEMS-chips with fluidic and electrical high voltage connections a direct comparison between chips is possible.
| Author: | Stephan WesterdickGND, Patrick HermannsORCiDGND, Benedikt JanßenGND, Thomas MuschGND |
|---|---|
| URN: | urn:nbn:de:hbz:294-67395 |
| DOI: | https://doi.org/10.3390/proceedings2131071 |
| Parent Title (English): | Proceedings |
| Publisher: | MDPI |
| Place of publication: | Basel |
| Document Type: | Article |
| Language: | English |
| Date of Publication (online): | 2019/11/18 |
| Date of first Publication: | 2018/11/30 |
| Publishing Institution: | Ruhr-Universität Bochum, Universitätsbibliothek |
| Tag: | LiGa-technology; MEMS-Chip; micro-mass spectrometer; o-ring; silicon-chip; spring-loaded pin; travelling wave |
| Volume: | 2 |
| Issue: | 13, Article 1071 |
| First Page: | 1071-1 |
| Last Page: | 1071-4 |
| Institutes/Facilities: | Lehrstuhl für elektronische Schaltungstechnik |
| open_access (DINI-Set): | open_access |
| faculties: | Fakultät für Elektrotechnik und Informationstechnik |
| Licence (English): |  Creative Commons - CC BY 4.0 - Attribution 4.0 International |
