Precursors for metal organic chemical vapor deposition (MOCVD) of \(ZrO_{2}\) and \(HfO_{2}\) thin films as gate dielectrics in complementary metal-oxide-semiconductor (CMOS) devices
- The thesis describes rational development of metalorganic precursors of Zr and Hf for the deposition of \(ZrO_{2}\) and \(HfO_{2}\) thin films by MOCVD. \(ZrO_{2}\) and \(HfO_{2}\) is an important material as an alternative gate dielectrics for \(SiO_{2}\) in microelectronics. The deposition of thin films by MOCVD has been established as a very useful fabrication process and requires volatile metalorganic precursors. Systematic variation in the ligand sphere of mixed \(\beta\)-diketonate/alkoxide type of complexes lead metalorganic precursors of Zr and Hf having excellent vaporisation characteristics and low decomposition temperatures, which showed promise for MOCVD of \(ZrO_{2}\) and \(HfO_{2}\) thin films. In this study, modified \(\beta\)-diketonate ligands namely \(\beta\)-ketoester and \(\beta\)-ketoamide as derivatives of the acac or the thd ligands has been employed. Using these complexes it was possible to grow \(ZrO_{2}\) and \(HfO_{2}\)$ thin films at low deposition temperatures.
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| Author: | Urmila PatilGND |
|---|---|
| URN: | urn:nbn:de:hbz:294-13512 |
| Referee: | Roland A. FischerGND, Martin MuhlerORCiDGND |
| Document Type: | Doctoral Thesis |
| Language: | English |
| Date of Publication (online): | 2005/07/19 |
| Date of first Publication: | 2005/07/19 |
| Publishing Institution: | Ruhr-Universität Bochum, Universitätsbibliothek |
| Granting Institution: | Ruhr-Universität Bochum, Fakultät für Chemie und Biochemie |
| Date of final exam: | 2005/02/04 |
| Creating Corporation: | Fakultät für Chemie und Biochemie |
| GND-Keyword: | MOCVD-Verfahren; Metallorganische Verbindungen: Thermoanalyse; Gate-Oxid; Dünne Schicht |
| Institutes/Facilities: | Lehrstuhl für Anorganische Chemie II, Organometallics & Materials Chemistry |
| Dewey Decimal Classification: | Naturwissenschaften und Mathematik / Chemie, Kristallographie, Mineralogie |
| faculties: | Fakultät für Chemie und Biochemie |
| Licence (German): |  Keine Creative Commons Lizenz - es gelten der Veröffentlichungsvertrag und das deutsche Urheberrecht |
